Compact Type

Megasonic Cleaning System 

Model C1500-ME  
 

with permanent and fullautomatic frequency tuning for
best cleaning results 
 
 

               

quartz tank

                        

                  

           immersed type transducer                                    PVDF- / PFA-tank

     

stainless steel tank

        

          Applications:

  • Etching (H2SO4, H2O2, SC-1, SC-2, ...) up to 90°C
  • FR-, QDR-cleaning of SI-wafer,masks and other substrates of any sizes 
  • cleaning of harddiscs, etc..

         

          Advantages :

  • Effective removing of submicron particles by megasonic power
  • Damagefree
  • Automatic frequency tuning for optimum cleaning results

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