Megasonic Cleaning System

Model C1500-ME

Compact Type
with permanent and fully automated frequency tuning for best cleaning results

Megasonic Reinigungssystem Modell C1500-ME
Quartz tank
Tauchtransducer
Immersed type transducer
PVDF- / PFA-Becken
PVDF / PFA tank type
Edelstahlbecken
Stainless steel tank

Applications:

  • Etching (H2SO4, H2O2, SC-1, SC-2, …) up to 90°C
  • FR-, QDR-cleaning of SI-wafer,masks and other substrates of any sizes
  • Cleaning of harddiscs, etc….

Advantages:

  • Effective removing of submicron particles by megasonic power
  • Damagefree cleaning
  • Automated frequency tuning for optimal cleaning results